MOCVD Growth and Characterization of GaN Films with Composite Intermediate Layer Buffer on Si Substrate

1999 ◽  
Vol 176 (1) ◽  
pp. 605-609 ◽  
Author(s):  
X. Zhang ◽  
S. J. Chua ◽  
Z. C. Feng ◽  
J. Chen ◽  
J. Lin
1987 ◽  
Vol 26 (Part 2, No. 10) ◽  
pp. L1587-L1589 ◽  
Author(s):  
Akinori Seki ◽  
Fumihiro Konushi ◽  
Jun Kudo ◽  
Seizo Kakimoto ◽  
Takashi Fukushima ◽  
...  

1994 ◽  
Vol 339 ◽  
Author(s):  
Yoshihiro Ueta ◽  
Shiro Sakai ◽  
Yasushi Kamiya ◽  
Hisao Sato

ABSTRACTThe acceptor binding energy is calculated to find out the best acceptor impurity in InN, GaN and AlN. Be is predicted to be the shallowest acceptor and the next are Mg and Zn. Group IV elements such as C or Si are very deep. Band lineup is calculated to be ΔEc : ΔEv = 2.1 eV : 0.76 eV = 0.73 : 0.27 = 2.8 : 1 for GaN/AlN and ΔEc : ΔEv = 0.88 eV : 0.66 eV = 0.57 : 0.43 = 1.3 : 1 for GaN/InN. GaN is grown on GaAs and GaP-coated Si substrate by MOCVD. GaAs intermediate layer gives better GaN compared to GaP intermediate layer. It is suggested that the lower bulk modulus of GaAs than that of GaP gives this difference.


1990 ◽  
Vol 198 ◽  
Author(s):  
T. Soga ◽  
H. Nishikawa ◽  
T. Jimbo ◽  
M. Umeno

ABSTRACTGaAs was grown on Si substrate by metalorganic chemical vapor deposition using GaAs/GaAsP strained layer superlattice (SLS) intermediate layers. The dislocation density decreases at the interface between GaAs and SLS, but does not decrease in the SLS. When GaAs/GaAsP SLS is used as the intermediate layer, a part of the dislocation propagates into the top GaAs layer because of the lattice mismatch of GaAs and SLS. The low etch-pit-density of (3-5) x 105 cm−2 was obtained by using the intermediate layer of GaAs/GaAsP SLS and AlAs/GaAs superlattice with thermal-cycle annealing.


2005 ◽  
Vol 892 ◽  
Author(s):  
Jung Han ◽  
K Kim ◽  
Jie Su ◽  
Maria Gherasimova ◽  
Arto Nurmikko ◽  
...  
Keyword(s):  

2015 ◽  
Vol 2015 (26) ◽  
pp. 4362-4372 ◽  
Author(s):  
Samuel D. Cosham ◽  
Gabriele Kociok-Köhn ◽  
Andrew L. Johnson ◽  
Jeff A. Hamilton ◽  
Michael S. Hill ◽  
...  

2001 ◽  
Vol 703 ◽  
Author(s):  
Huiping Xu ◽  
Adam T. Wise ◽  
Timothy J. Klemmer ◽  
Jörg M. K. Wiezorek

ABSTRACTA combination of XRD and TEM techniques have been used to characterize the response of room temperature magnetron sputtered Fe-Pd thin films on Si-susbtrates to post-deposition order-annealing at temperatures between 400-500°C. Deposition produced the disordered Fe-Pd phase with (111)-twinned grains approximately 18nm in size. Ordering occurred for annealing at 450°C and 500°C after 1.8ks, accompanied by grain growth (40-70nm). The ordered FePd grains contained (111)-twins rather than {101}-twins typical of bulk ordered FePd. The metallic overlayers and underlayers selected here produced detrimental dissolution (Pt into Fe-Pd phases) and precipitation reactions between Pd and the Si substrate.


1996 ◽  
Vol 423 ◽  
Author(s):  
J. C. Roberts ◽  
F. G. Mcintosh ◽  
M. Aumer ◽  
V. Joshkin ◽  
K. S. Boutros ◽  
...  

AbstractThe emission wavelength of the InxGa1−xN ternary system can span from the near ultraviolet through red regions of the visible spectrum. High quality double heterostructures with these InxGa1−xN active layers are essential in the development of efficient optoelectronic devices such as high performance light emitting diodes and laser diodes. We will report on the MOCVD growth and characterization of thick and thin InGaN films. Thick InxGa1−xN films with values of x up to 0.40 have been deposited and their photoluminescence (PL) spectra measured. AlGaN/InGaN/AlGaN double heterostructures (DHs) have been grown that exhibit PL emission in the violet, blue, green and yellow spectral regions, depending on the growth conditions of the thin InGaN active layer. Preliminary results of an AllnGaN/InGaN/AllnGaN DH, with the potential of realizing a near-lattice matched structure, will also be presented.


2012 ◽  
Vol 7 (1) ◽  
pp. 388 ◽  
Author(s):  
Karumbaiah N Chappanda ◽  
York R Smith ◽  
Swomitra K Mohanty ◽  
Loren W Rieth ◽  
Prashant Tathireddy ◽  
...  
Keyword(s):  

1991 ◽  
Vol 220 ◽  
Author(s):  
J. B. Posthill ◽  
D. P. Malta ◽  
R. Venkatasubramanian ◽  
P. R. Sharps ◽  
M. L. Timmons ◽  
...  

ABSTRACTInvestigation has continued into the use of SixGe1−x multilayer structures (MLS) as a buffer layer between a Si substrate and a GaAs epitaxial layer in order to accommodate the 4.1% lattice mismatch. SixGe1−x 4-layer and 5-layer structures terminating in pure Ge have been grown using molecular beam epitaxy. Subsequent GaAs heteroepitaxy has allowed evaluation of these various GaAs/SixGe1−xMLS/Si (100) structures. Antiphase domain boundaries have been eliminated using vicinal Si (100) substrates tilted 6° off-axis toward [011], and the etch pit density in GaAs grown on a 5-layer SixGe1−x MLS on vicinal Si (lOO) was measured to be 106 cm−2.


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